专利名称：Hollow cathode ion sources发明人：Ryota Fukui,Kenichi Takagi,Riichi
Kikuchi,Kazuo Takayama,Akira Tonegawa
申请号：US07/164803申请日：19880307公开号：US04894546A公开日：19900116
摘要：A hollow cathode ion source for in a vacuum chamber wherein it comprises acylindrical cathode through one end of which a gaseous medium of at least a dischargemaintaining gas or said discharge maintaining gas and a metal vapor is or are introduced,and an anode provided on the other end of said cylindrical cathode and having at leastone ion extraction opening, said gaseous medium being ionized by a discharge meansbetween said cylindrical cathode and said anode to produce ions which are extractedthrough said ion extraction opening in the axial direction of said cylindrical cathode.
The cylindrical cathode in the ion source has a large diameter at least about half andpreferably about equal to its axial length and may be directly cooled.
申请人：NIHON SHINKU GIJUTSU KABUSHIKI KAISHA
代理人：Hugh Adam Kirk
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容