Sensor for measuring low dynamic pressures in the

专利名称：Sensor for measuring low dynamic pressures

in the presence of high static pressures

发明人：Anthony D. Kurtz申请号：US11521122申请日：20060914

公开号：US20070006660A1公开日：20070111

专利附图：

摘要：A sensor is described, which basically consists of a leadless high sensitivitydifferential transducer chip which responds to both static and dynamic pressure. Locatedon the transducer are two sensors. One sensor has a thicker diaphragm and responds to

both static and dynamic pressure to produce an output indicative of essentially staticpressure, the static pressure being of a much higher magnitude than dynamic pressure.The other sensor has a thinner diaphragm and has one side or surface responsive to bothstatic and dynamic pressure. The other side of the differential sensor or transducerstructure has a long serpentine reference tube coupled to the underneath of thediaphragm. The tube only allows static pressure to be applied on the underside of thediaphragm and because of the natural resonance frequency of the tube, the dynamicpressure is suppressed and does not, in any manner, interface with the sensor ortransducer having a thinned diaphragm. Thus, the thinned diaphragm differential unitprovides an output which is indicative of the dynamic pressure, as the static pressureapplied to both the top and bottom surfaces of the transducer sensor is cancelled.

申请人：Anthony D. Kurtz

地址：Ridgewood NJ US

国籍：US

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